
| Item | JSM-7800F PRIME |
|---|---|
| Magnification | ×25~×1,000,000 |
| Accelerating voltage | 10V~30kV |
| Spatial resolution | 0.7nm |
| Probe current | several pA ~ 500nA |
| Tilt angle | -5~+70° |
| Special detectors | Energy Dispersive X-ray Spectrometer(EDS) |
・Multiple detectors to acquire all information simultaneously
