Item | JSM-7800F PRIME |
---|---|
Magnification | ×25~×1,000,000 |
Accelerating voltage | 10V~30kV |
Spatial resolution | 0.7nm |
Probe current | several pA ~ 500nA |
Tilt angle | -5~+70° |
Special detectors | Energy Dispersive X-ray Spectrometer(EDS) |
・Multiple detectors to acquire all information simultaneously